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全氟丁基磺酸三苯基锍鹽

非售品
CAS:144317-44-2
分子式:C22H15F9O3S2
分子量:562.46

結構式
    


CAS: 144317-44-2
分子式: C22H15F9O3S2
分子量: 562.46
 
中文名稱: 全氟丁基磺酸三苯基锍鹽
 
英文名稱: Triphenylsulfonium nonaflate
      Triphenylsulfonium perfluoro-1-butanesufonate
 
性狀描述: 白色結晶粉末,熔點84-88℃ ,溶解性 丙二醇單甲基醚酯(PGMEA)約50%,γ-丁基內酯約65%,乙酸乙酯約65% 。PAG-4L在樹脂和溶劑中溶解性能好,酸性強,純度高,熱穩定性高,揮發性低。
 
用途: 表面活性劑(SAA),陽離子光引發劑,光致產酸劑(PAG),與全氟辛基磺酸三苯基锍鹽(TPS-PFOS)相比,安全、衛生、低毒、環境友好,可作為目前157-nm、193-nm、248-nm光刻膠中常用光酸劑(PAG)全氟辛基磺酸三苯基锍鹽(TPS-PFOS)的替代品。

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